PVDvsCVD advantages and disadvantages

The main differences between chemical vapor deposition (CVD) and physical vapor deposition (PVD) processes are discussed in relation to a number of properties which are important for the functional behavior of coatings: chemical composition, phase composition, microstructure, thickness, hardness, texture, internal stresses, morphology, and roughness; each of which is discussed. Results of friction and wear tests which were performed under different conditions are reported, which reveal important aspects of the tribological behavior of different coatings. Examples of the application of CVD and PVD coatings are presented which show the possibilities for decreasing friction and wear of tools and machine elements.

K.‐H. Habig; Chemical vapor deposition and physical vapor deposition coatings: Properties, tribological behavior, and applications. J. Vac. Sci. Technol. A 1 November 1986; 4 (6): 2832–2843. https://doi.org/10.1116/1.573687